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Python tool for modeling silicon etch profile from the dry plasma etching tool in the SNF

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PythonDryEtchModel

Python tool for modeling silicon etch profile from the dry plasma etching tool in the SNF

Demo and Features

see https://github.com/cococastano/PythonDryEtchModel

Requirement

  • WSL2 + Ubuntu20.04
  • Mobaxterm (or Xserver)
  • python 3.8.6

Installation

sudo apt install libopencv-dev
pip install vtk opencv-python
pip install numpy pyvista matplotlib scipy shapely
#pip install cv2
pip install opencv-contrib-python
python -c "import cv2; print( cv2.__version__ )"


pip install open3d
pip install pyvistaqt

sudo apt install qtbase5-dev qttools5-dev-tools qt5-default
pip install pyqt5
sudo apt install libxkbcommon-x11-0
pip uninstall opencv-python opencv-contrib-python
pip install  opencv-python-headless opencv-contrib-python-headless

Usage

  • Run Xserver and set DISPLAY environemnt variable properly in advance.
git clone https://github.com/cococastano/PythonDryEtchModel cococastano
cp -rp cococastano/ExampleMasks masks
running Xserver
python Etch_model_version12.py

Note

TBD

Author

This branch is modified by [email protected]

License

TBD

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Python tool for modeling silicon etch profile from the dry plasma etching tool in the SNF

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